HALO KA Max CH4

Enabling Ultimate Methane Detection Performance in Semiconductor Manufacturing

As the International Roadmap for Devices and Systems (IRDS) drives the semiconductor industry beyond Moore’s Law and sets the requirements for the next decade, Tiger Optics accepts the challenge with the HALO KA Max CH4.

Building on Tiger Optics’ customer-acknowledged and renowned time-based technology—Continuous-Wave Cavity Ring-Down Spectroscopy—users can verify methane impurity levels down to 500 ppt or less in semi bulk gases, with drift-free stability and virtually instant response to upsets.

The HALO KA Max CH4, based on Tiger Optics’ latest platform, offers exceptional speed and further improved usability in an all-inclusive and compact form factor. The analyzer is fast to install, easy to use and effortless to maintain, with built-in zero verification. The HALO KA Max CH4 excels in trace-level methane detection in bulk gases and specialty gases used in semiconductor manufacturing.

Applications

  • High-Purity Gases & Systems
  • Research & Development

Detectie

Detection and Matrix Range LDL (3σ) Precision (1σ) @ zero
CH4 in N2 0 – 8 ppm 500 ppt 200 ppt
CH4 in He 0 – 5 ppm 400 ppt 140 ppt
CH4 in Ar 0 – 7 ppm 450 ppt 150 ppt
CH4 in H2 0 – 8 ppm 500 ppt 200 ppt
CH4 in O2 0 – 7 ppm 500 ppt 200 ppt

Specificaties

Performance
Operating range See Detection Capability table
Detection Limit (3σ/24h) See Detection Capability table
Precision (1σ, greater of) ± 0.75% or 1/3 of LDL
Accuracy (greater of) ± 4% or LDL
Speed of response < 1 minute to 95%
Environmental conditions 10°C to 40°C, 30% to 80% RH (non-condensing)
Storage temperature -10°C to 50°C
Gas Handling System and Conditions
Gas connections 1/4” male VCR inlet and outlet
Leak tested to 1 x 10-9 mbar l / sec
Inlet pressure 10 − 125 psig (1.7 − 9.6 bara)
Flow rate ∼2 slpm in N2 (gas dependent)
Sample gases See Detection Capability table
Gas temperature Up to 60°C
Dimensions, H x W x D
Standard sensor 8.73″ x 8.57″ x 23.6″ (222 mm x 218 mm x 599 mm)
Sensor rack (fits up to two sensors) 8.73″ x 19.0″ x 23.6″ (222 mm x 483 mm x 599 mm)
Weight
Standard sensor 28 lbs (12.7 kg)
Electrical and Interfaces
Platform Max series analyzer
Alarm indicators 2 user programmable, 1 system fault, Form C relays
Power requirements 90 − 240 VAC, 50/60 Hz
Power consumption 40 Watts max.
Signal output Isolated 4−20 mA
User interfaces 5.7” LCD touchscreen, 10/100 Base-T Ethernet
USB, RS-232, RS-485, Modbus TCP (optional)
Data storage Internal or external flash drive
Certification CE Mark
Patents
U.S. Patent #7,277,177
*The Detection limit (LDL) is defined as 3σ over 24h
or the H2O drydown limit, whichever is higher

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