HALO KA Max H2O
Enabling Ultimate Moisture Detection Performance in Semiconductor Manufacturing
As the International Roadmap for Devices and Systems (IRDS) drives the semiconductor industry beyond Moore’s Law and sets the requirements for the next decade, Tiger Optics accepts the challenge with the HALO KA Max H2O.
Building on Tiger Optics’ customer-acknowledged and renowned time-based technology—Continuous-Wave Cavity Ring-Down Spectroscopy—users can verify moisture impurity levels down to 100 ppt in semi bulk gases, with drift-free stability and virtually instant response to moisture upsets.
The HALO KA Max H2O, based on Tiger Optics’ latest platform, offers exceptional speed and further improved usability in an all-inclusive and compact form factor. The analyzer is fast to install, easy to use and effortless to maintain, with built-in zero verification. The HALO KA Max H2O excels in trace-level moisture detection in bulk gases and specialty gases used in semiconductor manufacturing.
Description
Maximizing ultimate low-detection performance and speed of response, the HALO KA Max H2O offers:
- Parts per trillion (ppt) moisture detection capability in an array of gases
- Absolute measurement (freedom from calibration)
- Field proven lowest Cost of Ownership and ease of use
- Wide dynamic range—over four orders of magnitude
- Unprecedented speed of response at sub-ppb H2O levels
- Compact footprint (two HALO KA Max fit in a 19” rack)
