HALO 3 CH4
The HALO 3 CH4 trace level methane gas analyzer provides users with the unmatched accuracy, reliability, speed of response and ease of operation that users of Tiger Optics analyzers have come to know and expect. Featuring Tiger Optics’ proven Cavity Ring-Down Spectroscopy-based trace gas sensor in a very compact and economic analyzer design, this versatile analyzer allows users to measure methane in most inert and passive gases with just one device. Users also enjoy freedom from requirements such as periodic sensor maintenance, span calibrations, purifier replacement and pump rebuilds. As a result, the HALO is ideally suited to many applications where trace gas measurement is extremely critical. These applications include silicon wafer manufacturing monitoring, fixed bulk gas continuous quality control, process tool monitoring, air separation, gas cylinder quality control and many other demanding applications.
Description
Designed for trace level methane analysis, the HALO 3 CH4 offers:
- Low single-digit parts per billion (ppb) methane detection capability in an array of gases
- Absolute measurement (freedom from calibration gases)
- Wide dynamic range
- Low cost of ownership and operational simplicity
- Clean technology—no external calibration gases required
- Compact analyzer footprint
Applications
Detectie
Detection and Matrix | Range | LDL (3σ) | Precision (1σ) @ zero |
---|---|---|---|
CH4 in N2 | 0 – 8 ppm | 1.6 ppb | 0.6 ppb |
CH4 in He | 0 – 5 ppm | 1.1 ppb | 0.4 ppb |
CH4 in Ar | 0 – 7 ppm | 1.4 ppb | 0.5 ppb |
CH4 in H2 | 0 – 8 ppm | 1.6 ppb | 0.6 ppb |
CH4 in O2 | 0 – 6 ppm | 1.1 ppb | 0.4 ppb |
Specificaties
Performance | |
---|---|
Operating range | See Detection Capability table |
Detection limit (LDL, 3σ/24h) | See Detection Capability table |
Precision (1σ, greater of) | ± 0.75% or 1/3 of LDL |
Accuracy (greater of) | ± 4% or LDL |
Speed of response | < 1 minute to 95% |
Environmental conditions | 10°C to 40°C, 30% to 80% RH (non-condensing) |
Storage temperature | -10°C to 50°C |
Gas Handling System and Conditions | |
Wetted materials | 316 stainless steel (optional corrosion-resistant material), 10 Ra surface finish |
Gas connections | 1/4″ male VCR inlet and outlet |
Leak tested to | 1 x 10-9 mbar l / sec |
Inlet pressure | 30 − 125 psig (3.1 − 9.6 bara) |
Flow rate | Up to 1.8 slpm |
Sample gases | Most inert, toxic, passive and corrosive matrices |
Gas temperature | Up to 60°C |
Dimensions, H x W x D | |
Standard sensor | 8.73″ x 8.57″ x 23.6″ (222 mm x 218 mm x 599 mm) |
Sensor rack (fits up to two sensors) | 8.73″ x 19.0″ x 23.6″ (222 mm x 483 mm x 599 mm) |
Weight | |
Standard sensor | 28 lbs (12.7 kg) |
Electrical and Interfaces | |
Platform | Max series analyzer |
Alarm indicators | 2 user programmable, 1 system fault, Form C relays |
Power requirements | 90 − 240 VAC, 50/60 Hz |
Power consumption | 40 Watts max. |
Signal output | Isolated 4−20 mA per sensor |
User interfaces | 5.7” LCD touchscreen, 10/100 Base-T Ethernet |
USB, RS-232, RS-485, Modbus TCP (optional) | |
Data storage | Internal or external flash drive |
Certification | CE Mark |
Patents | |
U.S. Patent #7,277,177 |