HALO OK
Leading choice for ultra-high purity gas users
Detect gas quality upsets before they damage your process. Using Tiger Optics’ HALO OK oxygen analyzer, you can verify oxygen impurity levels with part-per-trillion accuracy, drift-free stability and instantaneous response. You’ll find our system exceptionally easy and fast to install, and effortless to maintain, with built-in zero verification. Its robust design—free of moving parts—results in an analyzer that has a high Mean Time Between Failure (MTBF) rate and a very low Cost of Ownership (CoO).
With its patented catalytic conversion technique, utilizing a minute amount of hydrogen to cleanly and safely convert oxygen to moisture, the OK offers a fully laser-based solution for Continuous Quality Control of your process. Based on powerful Cavity Ring-Down Spectroscopy, the HALO OK aligns with the SEMI F-112 standard for moisture dry-down characterization of gas systems. Pair the new HALO OK with our HALO KA for ppt-level moisture measurement to enjoy the many advantages of profit-boosting CRDS technology for both critical contaminants.
Description
Designed for trace-level oxygen analysis, the HALO OK offers:
- Industry-leading parts-per-trillion detection capability
- Unprecedented speed of response
- Wide dynamic range
- Absolute measurement (freedom from need for calibration gases)
- Low maintenance and cost of ownership
- Compact, portable package, ideal for both fixed and mobile cart installation
- Direct measurement in many matrices
Applications
Detectie
Detection and Matrix | Range | LDL (3σ)† | Precision (1σ) @ zero |
---|---|---|---|
Standard Model (using pure H2 utility gas) |
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O2 in He | 0 – 0.5 ppm | 50 ppt | 17 ppt |
O2 in Ar | 0 – 1 ppm | 90 ppt | 30 ppt |
O2 in H2 | 0 – 2 ppm | 150 ppt | 50 ppt |
O2 in N2 | 0 – 2.5 ppm | 200 ppt | 70 ppt |
CO2 Model (using pure H2 utility gas) |
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O2 in He | 0 – 0.5 ppm | 50 ppt | 17 ppt |
O2 in Ar | 0 – 1 ppm | 90 ppt | 30 ppt |
O2 in H2 | 0 – 2 ppm | 150 ppt | 50 ppt |
O2 in N2 | 0 – 2.5 ppm | 200 ppt | 70 ppt |
O2 in CO2§ | 0 – 5 ppm | 5000 ppt | 300 ppt |
Enhanced Safety Model (using 3% H2/97% N2 mixture utility gas) |
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O2 in He | 0 – 0.5 ppm | 400 ppt‡ | 17 ppt |
O2 in Ar | 0 – 1 ppm | 400 ppt‡ | 30 ppt |
O2 in H2 | 0 – 2 ppm | 400 ppt‡ | 50 ppt |
O2 in N2 | 0 – 2.5 ppm | 400 ppt‡ | 70 ppt |
†LDL is dependent upon the quality of the sample gas and the integrity of the sampling system. |
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‡LDL is limited by minimum achievable O2 concentration, not by 3σ baseline noise. |
Specificaties
Performance | |
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Operating range | See Detection Capability table |
Detection limit† (LDL, 3σ/24h) | See Detection Capability table |
Sensitivity (3σ) | See Detection Capability table |
Precision (1σ, greater of) | ± 0.75% or 1/3 of Sensitivity |
Accuracy (greater of) | ± 4% or 1/2 of LDL |
Speed of response | < 3 minutes to 95% |
Environmental conditions | 10°C to 40°C, 30% to 80% RH (non-condensing) |
Storage temperature | -10°C to 50°C |
Gas Handling System and Conditions | |
Wetted materials | 316L stainless steel, 10 Ra surface finish |
Leak tested to | 1 x 10-9 mbar l / sec |
Gas connections | 1/4” male VCR inlet and outlet |
Sample inlet pressure | 10 − 125 psig (1.7 − 9.6 bara) |
Sample flow rate | 0.5 – 1.8 slpm (gas dependent) |
Sample gases | Most inert matrices |
Gas temperature | Up to 60°C |
H2 supply requirements* | ~15 sccm, 20 − 125 psig |
Dimensions, H x W x D | |
Standard sensor | 8.73″ x 19.0″ x 23.6″ (222 mm x 483 mm x 599 mm) |
Weight | |
Standard sensor | 45 lbs (20.4 kg) |
Electrical and Interfaces | |
Platform | Max series analyzer |
Alarm indicators | 2 user programmable, 1 system fault, Form C relays |
Power requirements | 100 − 240 VAC, 50/60 Hz |
Power consumption | 450 Watts max. |
Signal output | Isolated 4−20 mA |
User interfaces | 5.7” LCD touchscreen, 10/100 Base-T Ethernet |
USB, RS-232, RS-485, Modbus TCP (optional) | |
Data storage | Internal or external flash drive |
Certification | CE Mark |
Patents | |
U.S. Patent #7,277,177 • U.S. Patent # 7,255,836 | |
*H2 supply (maximum 10 ppm H2O and O2 impurity) is required for sample conditioning via catalytic conversion. |
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†LDL is dependent upon the quality of the sample gas and the integrity of the sampling system. |