Name: HALO Max QCL CO 2 - ankersmid.eu
Brand: Gasanalyse

HALO Max QCL CO₂

Expanding Optical Contaminant Detection Capabilities for Semiconductor Manufacturing

Tiger Optics takes Cavity Ring-Down Spectroscopy (CRDS) to the next level by bringing you the latest optical technology. Utilizing mid-infrared Quantum Cascade Lasers (QCLs), the new HALO Max QCL allows dramatic decreases in detection limits for certain molecules, such as CO₂.

Introducing the HALO Max QCL CO₂ for ppt-level carbon dioxide detection, it is based on Tiger Optics’ latest Max platform, offers exceptional speed and further improved usability in an all-inclusive and robust package. The analyzer is fast to install, offers continuous, real-time detection, and is easy to use and effortless to maintain, with built-in zero verification and zero drift.

The HALO Max QCL CO₂ perfectly complement Tiger’s HALO KA Max series (for H₂O, NH₃ and CH₄), the HALO OK (for O₂) and our other QCL-based analyzer, the HALO Max QCL CO to utilize the advantages of CRDS for detection of a large variety of critical trace impurities.

Producten

Categories: Gasanalyse, Extractief, Halo, Tiger Optics

Kenmerken

Parts-per-trillion (ppt) detection capability for carbon dioxide (CO₂) in UHP bulk gases
Incorporates mid-infrared QCL technology to achieve the ultimate sensitivity
Absolute measurement (freedom from calibration)
Excellent speed of response at ppb levels and below
Continuous measurement—no batch processing typical with GCs
Robust design & maximum ease of use

Applicaties

Gas Quality Control
High-Purity Gases & Systems
Research & Development
Semiconductor Process Tools

Detectie

Detection and Matrix	Range*	LDL^† (3σ)	Precision (1σ) @ zero
CO₂ in N₂	0 – 0.4 ppm	100 ppt	35 ppt
CO₂ in He	0 – 0.4 ppm	90 ppt	30 ppt
CO₂ in Ar	0 – 0.4 ppm	90 ppt	30 ppt
CO₂ in O₂	0 – 0.4 ppm	90 ppt	30 ppt
CO₂ in Clean Dry Air (CDA)	0 – 0.4 ppm	100 ppt	35 ppt
*Higher range is available upon request.
^†Due to the high abundance of CO₂ in air, purging of the analyzer housing is required to achieve specified LDL (see previous page for purge gas requirements)

Specificaties

Performance
Operating range	See Detection Capability table
Detection Limit (LDL)	See Detection Capability table
Precision (1σ, greater of)	± 0.75% or 1/3 of LDL
Accuracy (greater of)	± 4% or LDL
Speed of response	< 1 minute to 95%
Environmental conditions	10°C to 40°C, 30% to 80% RH (non-condensing)
Storage temperature	-10°C to 50°C
Gas Handling System and Conditions
Gas connections	1/4” male VCR inlet and outlet
Leak tested to	1 x 10^-9 mbar l / sec
Inlet pressure	6 − 125 psig (1.4 − 9.6 bara)
Flow rate	∼1 slpm in N₂ (gas dependent)
Sample gases	Most inert and passive gases
Gas temperature	Up to 60°C
Purge gas	Inert gas (e.g. N₂), <1 ppm CO₂, 30 − 150 psig, 4 − 5 slpm
Purge gas connection	1/8″ Swagelok®
Dimensions, H x W x D
Standard sensor	8.75″ x 19.0″ x 24.0″ (222 mm x 483 mm x 610 mm)
Weight
Standard sensor	40 lbs (18 kg)
Electrical and Interfaces
Platform	Max series analyzer
Alarm indicators	2 user programmable, 1 system fault, Form C relays
Power requirements	90 − 240 VAC, 50/60 Hz
Power consumption	100 Watts max.
Signal output	Isolated 4−20 mA
User interfaces	5.7” LCD touchscreen, 10/100 Base-T Ethernet
	USB, RS-232, RS-485, Modbus TCP (optional)
Data storage	Internal or external flash drive
Patents
U.S. Patent #7,277,177