Expanding Optical Contaminant Detection Capabilities for Semiconductor Manufacturing

Tiger Optics takes Cavity Ring-Down Spectroscopy (CRDS) to the next level by bringing you the latest optical technology. Utilizing mid-infrared Quantum Cascade Lasers (QCLs), the new HALO Max QCL allows dramatic decreases in detection limits for certain molecules, such as CO2.

Introducing the HALO Max QCL CO2 for ppt-level carbon dioxide detection, it is based on Tiger Optics’ latest Max platform, offers exceptional speed and further improved usability in an all-inclusive and robust package. The analyzer is fast to install, offers continuous, real-time detection, and is easy to use and effortless to maintain, with built-in zero verification and zero drift.

The HALO Max QCL CO2 perfectly complement Tiger’s HALO KA Max series (for H2O, NH3 and CH4), the HALO OK (for O2) and our other QCL-based analyzer, the HALO Max QCL CO to utilize the advantages of CRDS for detection of a large variety of critical trace impurities.


  • Parts-per-trillion (ppt) detection capability for carbon dioxide (CO2) in UHP bulk gases
  • Incorporates mid-infrared QCL technology to achieve the ultimate sensitivity
  • Absolute measurement (freedom from calibration)
  • Excellent speed of response at ppb levels and below
  • Continuous measurement—no batch processing typical with GCs
  • Robust design & maximum ease of use


  • Gas Quality Control
  • High-Purity Gases & Systems
  • Research & Development
  • Semiconductor Process Tools


Detection and Matrix Range* LDL (3σ) Precision (1σ) @ zero
CO2 in N2 0 – 0.4 ppm 100 ppt 35 ppt
CO2 in He 0 – 0.4 ppm 90 ppt 30 ppt
CO2 in Ar 0 – 0.4 ppm 90 ppt 30 ppt
CO2 in O2 0 – 0.4 ppm 90 ppt 30 ppt
CO2 in Clean Dry Air (CDA) 0 – 0.4 ppm 100 ppt 35 ppt
*Higher range is available upon request.
Due to the high abundance of CO2 in air,
purging of the analyzer housing is required
to achieve specified LDL (see previous page
for purge gas requirements)


Operating range See Detection Capability table
Detection Limit (LDL) See Detection Capability table
Precision (1σ, greater of) ± 0.75% or 1/3 of LDL
Accuracy (greater of) ± 4% or LDL
Speed of response < 1 minute to 95%
Environmental conditions 10°C to 40°C, 30% to 80% RH (non-condensing)
Storage temperature -10°C to 50°C
Gas Handling System and Conditions
Gas connections 1/4” male VCR inlet and outlet
Leak tested to 1 x 10-9 mbar l / sec
Inlet pressure 6 − 125 psig (1.4 − 9.6 bara)
Flow rate ∼1 slpm in N2 (gas dependent)
Sample gases Most inert and passive gases
Gas temperature Up to 60°C
Purge gas Inert gas (e.g. N2), <1 ppm CO2, 30 − 150 psig, 4 − 5 slpm
Purge gas connection 1/8″ Swagelok®
Dimensions, H x W x D
Standard sensor 8.75″ x 19.0″ x 24.0″ (222 mm x 483 mm x 610 mm)
Standard sensor 40 lbs (18 kg)
Electrical and Interfaces
Platform Max series analyzer
Alarm indicators 2 user programmable, 1 system fault, Form C relays
Power requirements 90 − 240 VAC, 50/60 Hz
Power consumption 100 Watts max.
Signal output Isolated 4−20 mA
User interfaces 5.7” LCD touchscreen, 10/100 Base-T Ethernet
USB, RS-232, RS-485, Modbus TCP (optional)
Data storage Internal or external flash drive
U.S. Patent #7,277,177


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